Yours, Etc.: Origins and Uses of 8 Sign-Offs
introduced 1947 (at 14th conference of the Union Internationale de Chimie) as a prefix for units of one thousand-millionth part, from Greek nanos "a dwarf." According to Watkins, this is originally "little old man," from nannos "uncle," masc. of nanna "aunt" (see nana). Earlier it was used as a prefix to mean "dwarf, dwarfish," and still in a non-scientific sense of "very small."
Extremely small: nanoid.
One-billionth (10-9): nanometer.