1903, coined by George Bernard Shaw to translate Ger.
Übermensch, "highly evolved human being that transcends good and evil," from "Thus Spake Zarathustra" (1883-91), by Friedrich Nietzsche (1844-1900). First used in Ger. by Hermann Rab (1527), and also used by Herder and Goethe. Translated as
overman (1895) and
beyond-man (1896) before Shaw got it right in his play title "Man and Superman" (1903). Application to comic strip hero is from 1938.
"So was created ... Superman! champion of the oppressed, the physical marvel who had sworn to devote his existence to helping those in need!" ["Action Comics," June 1, 1938]
Superwoman first recorded 1976 in the sense of "one who combines career and motherhood."