noun, plural epitaxies. Crystallography.
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World English Dictionary
epitaxy or epitaxis (ˈɛpɪˌtæksɪ)
the growth of a thin layer on the surface of a crystal so that the layer has the same structure as the underlying crystal
epitaxis or epitaxis
epitaxial or epitaxis

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Example sentences
We used silane in the semiconductor industry for epitaxy for years.
In situ metrology during the growth of compound semiconductors by molecular beam epitaxy.
Elastic effects and phase segregation during the growth of thin alloy layers by molecular-beam epitaxy.
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