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[foh-toh-li-thog-ruh-fee] /ˌfoʊ toʊ lɪˈθɒg rə fi/
the technique or art of making photolithographs.
Electronics. a process whereby integrated and printed circuits are produced by photographing the circuit pattern on a photosensitive substrate and chemically etching away the background.
Origin of photolithography
1855-60; photo- + lithography
Related forms
[foh-tuh-lith-uh-graf-ik] /ˌfoʊ təˌlɪθ əˈgræf ɪk/ (Show IPA),
photolithographer, noun Unabridged
Based on the Random House Dictionary, © Random House, Inc. 2015.
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Examples from the web for photolithography
  • Both of these surfaces would be created by photolithography, the process used to make computer chips.
  • The different layers were then etched using photolithography to make the final pattern for transistors.
  • Then the researchers can make transistors by depositing source, drain, and gate electrodes using conventional photolithography.
  • The following are the potential hazards of photolithography.
  • photolithography provides a useful tool for producing structures consisting of micron-sized features.
  • Each mask is dedicated to a layer on which a pattern is transferred by a process called photolithography.
  • photolithography is a common technique for patterning features on planar substrates.
  • photolithography, the process used to fabricate integrated circuits, is the key enabler and driver for the semiconductor industry.
British Dictionary definitions for photolithography


a lithographic printing process using photographically made plates Often shortened to photolitho (ˌfəʊtəʊˈlaɪθəʊ)
(electronics) a process used in the manufacture of semiconductor devices, thin-film circuits, optical devices, and printed circuits in which a particular pattern is transferred from a photograph onto a substrate, producing a pattern that acts as a mask during an etching or diffusion process See also planar process
Derived Forms
photolithographer, noun
photolithographic (ˌfəʊtəʊˌlɪθəˈɡræfɪk) adjective
photolithographically, adverb
Collins English Dictionary - Complete & Unabridged 2012 Digital Edition
© William Collins Sons & Co. Ltd. 1979, 1986 © HarperCollins
Publishers 1998, 2000, 2003, 2005, 2006, 2007, 2009, 2012
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