tetrafluoride

[te-truh-floor-ahyd, -flawr-, -flohr-]
noun Chemistry.
a fluoride containing four fluorine atoms.

Origin:
1905–10; tetra- + fluoride

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Silicon tetrafluoride is used on a limited basis in microelectronics.
Boron tetrafluoride is used for doping silicon chips and other purposes in the chemical industry.
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