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Fourier transform
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interferogram
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Interferogram
Precise Metrology & Control of Wafer Geometry & Surface Topography
www.KLA-Tencor.com
in⋅ter⋅fer⋅o⋅gram
/
ˌɪn
tərˈfɪər
əˌgræm
/
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[
in-ter-
feer
-
uh
-gram
]
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interferogram
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interferogram
–noun
Optics
.
a photographic record of light interference patterns produced with an interferometer, used for recording shock waves and fluid flow patterns.
Origin:
1920–25;
interfere
+
-o-
+
-gram
1
Dictionary.com Unabridged
Based on the Random House Dictionary, © Random House, Inc. 2009.
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Interferogram
Precise Metrology & Control of Wafer Geometry & Surface Topography
www.KLA-Tencor.com
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