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late 14c. "to consider, contemplate" (implied in surveyance), from Old French surveeir, from Medieval Latin supervidere "oversee" (see supervise). Meaning "examine the condition of" is from mid-15c. That of "to take linear measurements of a tract of ground" is recorded from 1540s. Related: Surveyed; surveying.
late 15c., survei, "oversight, supervision," from survey (v.). The meaning "act of viewing in detail" is from 1540s. Meaning "systematic collection of data on opinions, etc." is attested from 1927.